Authors:
Bhusari, D
Reed, HA
Wedlake, M
Padovani, AM
Allen, SAB
Kohl, PA
Citation: D. Bhusari et al., Fabrication of air-channel structures for microfluidic, microelectromechanical, and microelectronic applications, J MICROEL S, 10(3), 2001, pp. 400-408