Citation: S. Summers et al., The effects of varying plasma parameters on silicon thin film growth by ECR plasma CVD, J PHYS D, 34(18), 2001, pp. 2782-2791
Citation: L. Wang et Hs. Reehal, Thin base-layer single crystal silicon solar cells with ECR plasma CVD grown emitters, J PHYS D, 34(16), 2001, pp. 2497-2503
Citation: Sj. Toal et al., Structural analysis of nanocrystalline SiC thin films grown on silicon by ECR plasma CVD, THIN SOL FI, 344, 1999, pp. 292-294