Authors:
Geerk, J
Zaitsev, A
Linker, G
Aidam, R
Schneider, R
Ratzel, F
Fromknecht, R
Scheerer, B
Reiner, H
Gaganidze, E
Schwab, R
Citation: J. Geerk et al., A 3-chamber deposition system for the simultaneous double-sided coating of5-inch wafers, IEEE APPL S, 11(1), 2001, pp. 3856-3858
Authors:
Huang, MQ
Geerk, J
Massing, S
Meyer, O
Reiner, H
Linker, G
Citation: Mq. Huang et al., Textured CeO2 buffer layers on amorphous substrates by ion beam assisted deposition, NUCL INST B, 148(1-4), 1999, pp. 793-797