Authors: Chen, IS Roeder, JF Kim, DJ Maria, JP Kingon, AI

Citation: Is. Chen et al., Metalorganic chemical vapor deposition Pb(Zr,Ti)O-3 and selected lower electrode structures as a pathway to integrated piezoelectric microelectromechanical systems, J VAC SCI B, 19(5), 2001, pp. 1833-1840

Authors: Roeder, JF Baum, TH Bilodeau, SM Stauf, GT Ragaglia, C Russell, MW Van Buskirk, PC

Citation: Jf. Roeder et al., Liquid-delivery MOCVD: Chemical and process perspectives on ferro-electricthin film growth, ADV MAT OPT, 10(3-5), 2000, pp. 145-154

Authors: Roeder, JF Hendrix, BC Hintermaier, F Desrochers, DA Baum, TH Bhandari, G Chappuis, M Van Buskirk, PC Dehm, C Fritsch, E Nagel, N Wendt, H Cerva, H Honlein, W Mazure, C

Citation: Jf. Roeder et al., Ferroelectric strontium bismuth tantalate thin films deposited by metalorganic chemical vapour deposition (MOCVD), J EUR CERAM, 19(6-7), 1999, pp. 1463-1466

Authors: Chen, IS Roeder, JF Glassman, TE Baum, TH

Citation: Is. Chen et al., Liquid delivery MOCVD of niobium-doped Pb(Zr,Ti)O-3 using a novel niobium precursor, CHEM MATER, 11(2), 1999, pp. 209-212