Authors:
Chen, IS
Roeder, JF
Kim, DJ
Maria, JP
Kingon, AI
Citation: Is. Chen et al., Metalorganic chemical vapor deposition Pb(Zr,Ti)O-3 and selected lower electrode structures as a pathway to integrated piezoelectric microelectromechanical systems, J VAC SCI B, 19(5), 2001, pp. 1833-1840
Authors:
Roeder, JF
Baum, TH
Bilodeau, SM
Stauf, GT
Ragaglia, C
Russell, MW
Van Buskirk, PC
Citation: Jf. Roeder et al., Liquid-delivery MOCVD: Chemical and process perspectives on ferro-electricthin film growth, ADV MAT OPT, 10(3-5), 2000, pp. 145-154
Authors:
Roeder, JF
Hendrix, BC
Hintermaier, F
Desrochers, DA
Baum, TH
Bhandari, G
Chappuis, M
Van Buskirk, PC
Dehm, C
Fritsch, E
Nagel, N
Wendt, H
Cerva, H
Honlein, W
Mazure, C
Citation: Jf. Roeder et al., Ferroelectric strontium bismuth tantalate thin films deposited by metalorganic chemical vapour deposition (MOCVD), J EUR CERAM, 19(6-7), 1999, pp. 1463-1466