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Davey, MH
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Authors:
Rohr, T
Knaus, S
Sherrington, DC
Gruber, H
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Authors:
Beitel, G
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Weinrich, V
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Hasler, B
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Gschwandtner, A
Pamler, W
Honlein, W
Dehm, C
Mazure, C
Citation: G. Beitel et al., A novel low-temperature (Ba,Sr)TiO3 (BST) process with Ti/TiN barrier for Gbit DRAM applications, MICROEL ENG, 48(1-4), 1999, pp. 299-302