Citation: A. Romanowski et al., Simulation of void and oxygen precipitation processes during high temperature annealing of silicon wafers, J APPL PHYS, 85(9), 1999, pp. 6408-6414
Authors:
Ono, T
Romanowski, A
Asayama, E
Horie, H
Sueoka, K
Tsuya, H
Rozgonyi, GA
Citation: T. Ono et al., Oxide precipitate-induced dislocation generation in heavily boron-doped Czochralski silicon, J ELCHEM SO, 146(9), 1999, pp. 3461-3465