Authors:
Wang, J
Shi, FG
Nieh, TG
Zhao, B
Brongo, MR
Qu, S
Rosenmayer, T
Citation: J. Wang et al., Thickness dependence of elastic modulus and hardness of on-wafer low-k ultrathin polytetrafluoroethylene films, SCR MATER, 42(7), 2000, pp. 687-694
Authors:
Schwodiauer, R
Neugschwandtner, GS
Bauer-Gogonea, S
Bauer, S
Rosenmayer, T
Citation: R. Schwodiauer et al., Dielectric and electret properties of nanoemulsion spin-on polytetrafluoroethylene films, APPL PHYS L, 76(18), 2000, pp. 2612-2614