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Results: 1
Resist dissolution rate and inclined-wall structures in deep x-ray lithography
Authors:
Liu, Z Bouamrane, F Roulliay, M Kupka, RK Labeque, A Megtert, S
Citation:
Z. Liu et al., Resist dissolution rate and inclined-wall structures in deep x-ray lithography, J MICROM M, 8(4), 1998, pp. 293-300
Risultati:
1-1
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