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Results: 1-3 |
Results: 3

Authors: Bourdelle, KK Chen, YN Ashton, RA Rubin, LM Agarwal, A Morris, WH
Citation: Kk. Bourdelle et al., Evaluation of high dose, high energy boron implantation into Cz substratesfor epi-replacement in CMOS technology, IEEE DEVICE, 48(9), 2001, pp. 2043-2049

Authors: Robertson, LS Jones, KS Rubin, LM Jackson, J
Citation: Ls. Robertson et al., Annealing kinetics of {311} defects and dislocation loops in the end-of-range damage region of ion implanted silicon, J APPL PHYS, 87(6), 2000, pp. 2910-2913

Authors: Robertson, LS Law, ME Jones, KS Rubin, LM Jackson, J Chi, P Simons, DS
Citation: Ls. Robertson et al., Correlation of end-of-range damage evolution and transient enhanced diffusion of boron in regrown silicon, APPL PHYS L, 75(24), 1999, pp. 3844-3846
Risultati: 1-3 |