Authors: Keranen, K Karioja, P Blomberg, M Tenhunen, J Rusanen, O Kopola, H

Citation: K. Keranen et al., Miniaturization and module integration of an infrared spectrometer, OPT ENG, 40(10), 2001, pp. 2308-2314

Authors: Torkkeli, A Rusanen, O Saarilahti, J Seppa, H Sipola, H Hietanen, J

Citation: A. Torkkeli et al., Capacitive microphone with low-stress polysilicon membrane and high-stresspolysilicon backplate, SENS ACTU-A, 85(1-3), 2000, pp. 116-123

Authors: Torkkeli, A Saarilahti, J Seppa, H Sipola, H Rusanen, O Hietanen, J

Citation: A. Torkkeli et al., Capacitive silicon microphone, PHYS SCR, T79, 1999, pp. 275-278