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Results:
1-3
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Results: 3
Miniaturization and module integration of an infrared spectrometer
Authors:
Keranen, K Karioja, P Blomberg, M Tenhunen, J Rusanen, O Kopola, H
Citation:
K. Keranen et al., Miniaturization and module integration of an infrared spectrometer, OPT ENG, 40(10), 2001, pp. 2308-2314
Capacitive microphone with low-stress polysilicon membrane and high-stresspolysilicon backplate
Authors:
Torkkeli, A Rusanen, O Saarilahti, J Seppa, H Sipola, H Hietanen, J
Citation:
A. Torkkeli et al., Capacitive microphone with low-stress polysilicon membrane and high-stresspolysilicon backplate, SENS ACTU-A, 85(1-3), 2000, pp. 116-123
Capacitive silicon microphone
Authors:
Torkkeli, A Saarilahti, J Seppa, H Sipola, H Rusanen, O Hietanen, J
Citation:
A. Torkkeli et al., Capacitive silicon microphone, PHYS SCR, T79, 1999, pp. 275-278
Risultati:
1-3
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