Authors: Guk, EG Tkachenko, AG Tokranova, NA Granitsyna, LS Astrova, EV Podlaskin, BG Nashchekin, AV Shul'pina, IL Rutkovskii, SV

Citation: Eg. Guk et al., Silicon structures with dielectric insulation obtained by vertical anisotropic etching, TECH PHYS L, 27(5), 2001, pp. 381-383