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Results: 1-3 |
Results: 3
Influence of principle operating parameters on chemical vapor deposition of silicon from silane in a fluidized bed to limit agglomeration problems
Authors: Ruvalcaba, JRR Caussat, B Hemati, M Couderc, JP
Citation: Jrr. Ruvalcaba et al., Influence of principle operating parameters on chemical vapor deposition of silicon from silane in a fluidized bed to limit agglomeration problems, CAN J CH EN, 78(5), 2000, pp. 955-963
Extension of the fluidized bed silicon CVD process to non-conventional operating conditions - Depositions on porous powders and or under reduced pressure
Authors: Ruvalcaba, JRR Caussat, B Hemati, M Couderc, JP
Citation: Jrr. Ruvalcaba et al., Extension of the fluidized bed silicon CVD process to non-conventional operating conditions - Depositions on porous powders and or under reduced pressure, CHEM ENGN J, 73(1), 1999, pp. 61-66
Hydrodynamic study of vacuum fluidized beds at high temperature
Authors: Ruvalcaba, JRR Caussat, B Hemati, M Couderc, JP
Citation: Jrr. Ruvalcaba et al., Hydrodynamic study of vacuum fluidized beds at high temperature, CAN J CH EN, 77(1), 1999, pp. 35-44
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