Authors:
Rymuza, Z
Misiak, M
Kuhn, L
Schmidt-Szalowski, K
Rzanek-Boroch, Z
Citation: Z. Rymuza et al., Control tribological and mechanical properties of MEMS surfaces. Part 2: nanomechanical behavior of self-lubricating ultrathin films, MICROSYST T, 5(4), 1999, pp. 181-188