Authors:
KURYSHEV GL
MYASNIKOV AM
OBODNIKOV VI
SAFRONOV LN
KHRYASCHEV GS
Citation: Gl. Kuryshev et al., REDISTRIBUTION OF BERYLLIUM IN INSB AND INAS RESULTING FROM ION-IMPLANTATION AND SUBSEQUENT ANNEALING, Semiconductors, 28(3), 1994, pp. 267-269
Authors:
GERASIMENKO NN
MYASNIKOV AM
OBODNIKOV VI
SAFRONOV LN
Citation: Nn. Gerasimenko et al., REDISTRIBUTION OF MAGNESIUM IN INAS DURING POSTIMPLANTATION ANNEALING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 924-926