Citation: Mr. Sajan et al., TDI IMAGING - A TOOL FOR PROFILOMETRY AND AUTOMATED VISUAL INSPECTION, Optics and lasers in engineering, 29(6), 1998, pp. 403-411
Authors:
WONG SP
CHEUNG WY
KE N
SAJAN MR
GUO WS
HUANG L
ZHAO SN
Citation: Sp. Wong et al., IR PHOTOELASTICITY STUDY OF STRESS-DISTRIBUTION IN SILICON UNDER THIN-FILM STRUCTURES, Materials chemistry and physics, 51(2), 1997, pp. 157-162