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SCHOLLKOPF W
TOENNIES JP
SAVAS TA
SMITH HI
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Authors:
SAVAS TA
SCHATTENBURG ML
CARTER JM
SMITH HI
Citation: Ta. Savas et al., LARGE-AREA ACHROMATIC INTERFEROMETRIC LITHOGRAPHY FOR 100 NM PERIOD GRATINGS AND GRIDS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4167-4170
Authors:
SAVAS TA
SHAH SN
SCHATTENBURG ML
CARTER JM
SMITH HI
Citation: Ta. Savas et al., ACHROMATIC INTERFEROMETRIC LITHOGRAPHY FOR 100-NM-PERIOD GRATINGS ANDGRIDS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2732-2735