Authors: SCHEEPER PR VANDERDONK AGH OLTHUIS W BERGVELD P

Citation: Pr. Scheeper et al., A REVIEW OF SILICON MICROPHONES, Sensors and actuators. A, Physical, 44(1), 1994, pp. 1-11

Authors: SCHEEPER PR OLTHUIS W BERGVELD P

Citation: Pr. Scheeper et al., IMPROVEMENT OF THE PERFORMANCE OF MICROPHONES WITH A SILICON-NITRIDE DIAPHRAGM AND BACKPLATE, Sensors and actuators. A, Physical, 40(3), 1994, pp. 179-186

Authors: VANDERDONK AGH SCHEEPER PR OLTHUIS W BERGVELD P

Citation: Agh. Vanderdonk et al., MODELING OF SILICON CONDENSER MICROPHONES, Sensors and actuators. A, Physical, 40(3), 1994, pp. 203-216