Authors:
STEMMER A
ZARSCHIZKY H
KNAPEK E
LEFRANC G
SCHERERWINNER H
Citation: A. Stemmer et al., DESIGN AND FABRICATION OF MULTILEVEL DIFFRACTIVE OPTICAL-ELEMENTS (DOES) AND HOLOGRAPHIC OPTICAL-ELEMENTS (HOES), Microelectronic engineering, 21(1-4), 1993, pp. 471-474