DESIGN AND FABRICATION OF MULTILEVEL DIFFRACTIVE OPTICAL-ELEMENTS (DOES) AND HOLOGRAPHIC OPTICAL-ELEMENTS (HOES)

Authors
STEMMER A ZARSCHIZKY H KNAPEK E LEFRANC G SCHERERWINNER H
Citation
A. Stemmer et al., DESIGN AND FABRICATION OF MULTILEVEL DIFFRACTIVE OPTICAL-ELEMENTS (DOES) AND HOLOGRAPHIC OPTICAL-ELEMENTS (HOES), Microelectronic engineering, 21(1-4), 1993, pp. 471-474
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
21
Issue
1-4
Year of publication
1993
Pages
471 - 474
Database
ISI
SICI code
0167-9317(1993)21:1-4<471:DAFOMD>2.0.ZU;2-J
Abstract
In this report we describe the design, calculation and fabrication of binary and multilevel DOEs. In particular we pay attention to the dire ct write ebeam process and the pattern transfer into Si-substrates by reactive ion etching. First results can be given in terms of the diffr action efficiency and image quality of binary DOEs applied in test cir cuits for light coupling and free space light transfer with a multifun ctional HOE.