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Authors: DAUKSHER WJ RESNICK DJ SMITH SM PENDHARKAR SV TOMPKINS HG CUMMINGS KD SEESE PA MANGAT PJS CHAN JA
Citation: Wj. Dauksher et al., UNIFORM LOW-STRESS OXYNITRIDE FILMS FOR APPLICATION AS HARDMASKS ON X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2232-2237

Authors: RESNICK DJ CUMMINGS KD DAUKSHER WJ JOHNSON WA SEESE PA CHEN HTH WELLS GM ENGELSTAD R CERRINA F
Citation: Dj. Resnick et al., THE EFFECT OF APERTURING ON RADIATION DAMAGE-INDUCED PATTERN DISTORTION OF X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3046-3049

Authors: DAUKSHER WJ RESNICK DJ SEESE PA CUMMINGS KD YANOF AW JOHNSON WA
Citation: Wj. Dauksher et al., EFFECT OF BRIGHTENER CONCENTRATION ON THE THERMAL DISTORTION OF GOLD PLATED X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3990-3994
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