Authors:
DAUKSHER WJ
RESNICK DJ
SMITH SM
PENDHARKAR SV
TOMPKINS HG
CUMMINGS KD
SEESE PA
MANGAT PJS
CHAN JA
Citation: Wj. Dauksher et al., UNIFORM LOW-STRESS OXYNITRIDE FILMS FOR APPLICATION AS HARDMASKS ON X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2232-2237
Authors:
RESNICK DJ
CUMMINGS KD
DAUKSHER WJ
JOHNSON WA
SEESE PA
CHEN HTH
WELLS GM
ENGELSTAD R
CERRINA F
Citation: Dj. Resnick et al., THE EFFECT OF APERTURING ON RADIATION DAMAGE-INDUCED PATTERN DISTORTION OF X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3046-3049
Authors:
DAUKSHER WJ
RESNICK DJ
SEESE PA
CUMMINGS KD
YANOF AW
JOHNSON WA
Citation: Wj. Dauksher et al., EFFECT OF BRIGHTENER CONCENTRATION ON THE THERMAL DISTORTION OF GOLD PLATED X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3990-3994