EFFECT OF BRIGHTENER CONCENTRATION ON THE THERMAL DISTORTION OF GOLD PLATED X-RAY MASKS

Authors
DAUKSHER WJ RESNICK DJ SEESE PA CUMMINGS KD YANOF AW JOHNSON WA
Citation
Wj. Dauksher et al., EFFECT OF BRIGHTENER CONCENTRATION ON THE THERMAL DISTORTION OF GOLD PLATED X-RAY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3990-3994
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3990 - 3994
Database
ISI
SICI code
1071-1023(1994)12:6<3990:EOBCOT>2.0.ZU;2-2