Authors: KOPRINAROV IN MULLERJAHREIS U THIELE P BOUAFIA M SEGHIR A

Citation: In. Koprinarov et al., CRITICAL ENERGY DENSITIES FOR AMORPHIZATION IN AR-ION IMPLANTED SILICON AT LOW ENERGIES, Physics letters. A, 227(3-4), 1997, pp. 241-244

Authors: MULLERJAHREIS U THIELE P BOUAFIA M SEGHIR A

Citation: U. Mullerjahreis et al., DETERMINATION OF LOW-ENERGY ION-IMPLANTATION DAMAGE PARAMETERS BY AN ELLIPSOMETRIC METHOD, Journal de physique. III, 5(5), 1995, pp. 575-584