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Results: 1-10 |
Results: 10
ETCHING MATERIALS WITH AN ATMOSPHERIC-PRESSURE PLASMA-JET
Authors: JEONG JY BABAYAN SE TU VJ PARK J HENINS I HICKS RF SELWYN GS
Citation: Jy. Jeong et al., ETCHING MATERIALS WITH AN ATMOSPHERIC-PRESSURE PLASMA-JET, Plasma sources science & technology, 7(3), 1998, pp. 282-285
DEPOSITION OF SILICON DIOXIDE FILMS WITH AN ATMOSPHERIC-PRESSURE PLASMA-JET
Authors: BABAYAN SE JEONG JY TU VJ PARK J SELWYN GS HICKS RF
Citation: Se. Babayan et al., DEPOSITION OF SILICON DIOXIDE FILMS WITH AN ATMOSPHERIC-PRESSURE PLASMA-JET, Plasma sources science & technology, 7(3), 1998, pp. 286-288
IN-SITU ANALYSIS OF PARTICLE CONTAMINATION IN MAGNETRON SPUTTERING PROCESSES
Authors: SELWYN GS WEISS CA SEQUEDA F HUANG C
Citation: Gs. Selwyn et al., IN-SITU ANALYSIS OF PARTICLE CONTAMINATION IN MAGNETRON SPUTTERING PROCESSES, Thin solid films, 317(1-2), 1998, pp. 85-92
PARTICLE CONTAMINATION FORMATION IN MAGNETRON SPUTTERING PROCESSES
Authors: SELWYN GS WEISS CA SEQUEDA F HUANG C
Citation: Gs. Selwyn et al., PARTICLE CONTAMINATION FORMATION IN MAGNETRON SPUTTERING PROCESSES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2023-2028
PLASMA GENERATION FOR MATERIALS PROCESSING
Authors: LIEBERMAN MA SELWYN GS TUSZEWSKI M
Citation: Ma. Lieberman et al., PLASMA GENERATION FOR MATERIALS PROCESSING, MRS bulletin, 21(8), 1996, pp. 32-37
PARTICLE CONTAMINATION CHARACTERIZATION IN A HELICON PLASMA-ETCHING TOOL
Authors: SELWYN GS BAILEY AD
Citation: Gs. Selwyn et Ad. Bailey, PARTICLE CONTAMINATION CHARACTERIZATION IN A HELICON PLASMA-ETCHING TOOL, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 649-654
ACROSS WAFER ETCH RATE UNIFORMITY IN A HIGH-DENSITY PLASMA REACTOR - EXPERIMENT AND MODELING
Authors: SURENDRA M GUARNIERI CR SELWYN GS DALVIE M
Citation: M. Surendra et al., ACROSS WAFER ETCH RATE UNIFORMITY IN A HIGH-DENSITY PLASMA REACTOR - EXPERIMENT AND MODELING, Applied physics letters, 66(18), 1995, pp. 2415-2417
A PHENOMENOLOGICAL STUDY OF PARTICULATES IN PLASMA TOOLS AND PROCESSES
Authors: SELWYN GS
Citation: Gs. Selwyn, A PHENOMENOLOGICAL STUDY OF PARTICULATES IN PLASMA TOOLS AND PROCESSES, JPN J A P 1, 32(6B), 1993, pp. 3068-3073
DETECTION OF PARTICLE TRAPS BY SPATIALLY-RESOLVED OPTICAL-EMISSION SPECTROSCOPY OVER GROOVED ELECTRODES IN RADIO-FREQUENCY DISCHARGES
Authors: DALVIE M SELWYN GS SURENDRA M GUARNIERI CR MCGILL JJ
Citation: M. Dalvie et al., DETECTION OF PARTICLE TRAPS BY SPATIALLY-RESOLVED OPTICAL-EMISSION SPECTROSCOPY OVER GROOVED ELECTRODES IN RADIO-FREQUENCY DISCHARGES, Applied physics letters, 63(24), 1993, pp. 3279-3281
SELF-CONSISTENT FLUID MODELING OF RADIO-FREQUENCY DISCHARGES IN 2 DIMENSIONS
Authors: DALVIE M SURENDRA M SELWYN GS
Citation: M. Dalvie et al., SELF-CONSISTENT FLUID MODELING OF RADIO-FREQUENCY DISCHARGES IN 2 DIMENSIONS, Applied physics letters, 62(24), 1993, pp. 3207-3209
Risultati: 1-10 |