Authors: LENG J OPSAL J CHU H SENKO M ASPNES DE

Citation: J. Leng et al., ANALYTIC REPRESENTATIONS OF THE DIELECTRIC FUNCTIONS OF CRYSTALLINE AND AMORPHOUS SI AND CRYSTALLINE GE FOR VERY LARGE-SCALE INTEGRATED DEVICE AND STRUCTURAL MODELING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1654-1657

Authors: OPSAL J FANTON J CHEN J LENG J WEI L UHRICH C SENKO M ZAISER C ASPNES DE

Citation: J. Opsal et al., BROAD-BAND SPECTRAL OPERATION OF A ROTATING-COMPENSATOR ELLIPSOMETER, Thin solid films, 313, 1998, pp. 58-61

Authors: LENG J OPSAL J CHU H SENKO M ASPNES DE

Citation: J. Leng et al., ANALYTIC REPRESENTATIONS OF THE DIELECTRIC FUNCTIONS OF MATERIALS FORDEVICE AND STRUCTURAL MODELING, Thin solid films, 313, 1998, pp. 132-136

Authors: LENG JM SIDOROWICH JJ SENKO M OPSAL J

Citation: Jm. Leng et al., SIMULTANEOUS MEASUREMENT OF 6 LAYERS IN A SILICON-ON-INSULATOR FILM STACK USING VISIBLE NEAR IR SPECTROPHOTOMETRY AND SINGLE-WAVELENGTH BEAM PROFILE REFLECTOMETRY, Thin solid films, 313, 1998, pp. 270-275

Authors: LENG JM CHEN J FANTON J SENKO M RITZ K OPSAL J

Citation: Jm. Leng et al., CHARACTERIZATION OF TITANIUM NITRIDE (TIN) FILMS ON VARIOUS SUBSTRATES USING SPECTROPHOTOMETRY, BEAM PROFILE REFLECTOMETRY, BEAM PROFILE ELLIPSOMETRY AND SPECTROSCOPIC BEAM PROFILE ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 308-313