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Results: 1
A STUDY OF REMOTE PLASMA-ENHANCED CVD OF SILICON-NITRIDE FILMS
Authors:
ALEXANDROV SE HITCHMAN ML SHAMLIAN S
Citation:
Se. Alexandrov et al., A STUDY OF REMOTE PLASMA-ENHANCED CVD OF SILICON-NITRIDE FILMS, Journal de physique. IV, 3(C3), 1993, pp. 233-240
Risultati:
1-1
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