Authors: TELFEYAN R MOYNE J CHAUDHRY N PUGMIRE J SHELLMAN S BONING D MOYNE W HURWITZ A TAYLOR J

Citation: R. Telfeyan et al., A MULTILEVEL APPROACH TO THE CONTROL OF A CHEMICAL-MECHANICAL PLANARIZATION PROCESS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1907-1913