Authors: SHEVELKO AP SHMAENOK LA CHURILOV SS BASTIAENSEN RKFJ BIJKERK F

Citation: Ap. Shevelko et al., EXTREME-ULTRAVIOLET SPECTROSCOPY OF A LASER-PLASMA SOURCE FOR LITHOGRAPHY, Physica scripta. T, 57(2), 1998, pp. 276-282

Authors: SHEVELKO AP

Citation: Ap. Shevelko, ABSOLUTE MEASUREMENTS IN THE VUV SPECTRAL RANGE IN THE AID OF A LUMINESCENT DETECTOR, Kvantovaa elektronika, 23(8), 1996, pp. 748-750

Authors: VASILEV AA MITROPOLSKII MM PLATONOV YY POKROVSKII YY SALASHCHENKO NN SHEVELKO AP

Citation: Aa. Vasilev et al., FORMATION OF MONOCHROMATIC POLARIZED SOFT -X-RAY BEAMS BY MULTILAYER X-RAY OPTICS, Kvantovaa elektronika, 22(4), 1995, pp. 408-410

Authors: BIJKERK F SHMAENOK LA SHEVELKO AP BASTIAENSEN RKFJ BRUINEMAN C VANHONK AGJR

Citation: F. Bijkerk et al., A HIGH-POWER, LOW-CONTAMINATION LASER-PLASMA SOURCE FOR EXTREME UV LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 299-301

Authors: BIJKERK F SHMAENOK L VANHONK A BASTIAENSEN R PLATONOV YY SHEVELKO AP MITROFANOV AV VOSS F DESOR R FROWEIN H NIKOLAUS B

Citation: F. Bijkerk et al., LASER-PLASMA SOURCES FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Journal de physique. III, 4(9), 1994, pp. 1669-1677

Authors: BIJKERK F LOUIS E VANDORSSEN GE SHEVELKO AP VASILYEV AA

Citation: F. Bijkerk et al., ABSOLUTE BRIGHTNESS OF LASER PLASMAS IN THE SOFT-X-RAY EMISSION BAND, Applied optics, 33(1), 1994, pp. 82-88