Citation: Ap. Shevelko, ABSOLUTE MEASUREMENTS IN THE VUV SPECTRAL RANGE IN THE AID OF A LUMINESCENT DETECTOR, Kvantovaa elektronika, 23(8), 1996, pp. 748-750
Authors:
BIJKERK F
SHMAENOK LA
SHEVELKO AP
BASTIAENSEN RKFJ
BRUINEMAN C
VANHONK AGJR
Citation: F. Bijkerk et al., A HIGH-POWER, LOW-CONTAMINATION LASER-PLASMA SOURCE FOR EXTREME UV LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 299-301