Authors: NXUMALO JN SHIMIZU DT THOMSON DJ SIMARDNORMADIN M

Citation: Jn. Nxumalo et al., HIGH-RESOLUTION CROSS-SECTIONAL IMAGING OF MOSFETS BY SCANNING RESISTANCE MICROSCOPY, IEEE electron device letters, 18(2), 1997, pp. 71-73

Authors: NXUMALO JN SHIMIZU DT THOMSON DJ

Citation: Jn. Nxumalo et al., CROSS-SECTIONAL IMAGING OF SEMICONDUCTOR-DEVICE STRUCTURES BY SCANNING RESISTANCE MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 386-389