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Authors: GERLACH JW KRAUS T SIENZ S MOSKE M ZEITLER M RAUSCHENBACH B
Citation: Jw. Gerlach et al., HIGHLY SENSITIVE IN-SITU MONITORING OF MECHANICAL-STRESS DURING ION-BEAM-ASSISTED DEPOSITION OF THIN TITANIUM NITRIDE FILMS, Surface & coatings technology, 104, 1998, pp. 281-286

Authors: ZEITLER M SIENZ S NEUMANN H ZEUNER M GERLACH JW RAUSCHENBACH B
Citation: M. Zeitler et al., IN-SITU STRESS-ANALYSIS OF BORON-NITRIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 139(1-4), 1998, pp. 327-331
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