Authors:
ZEITLER M
SIENZ S
NEUMANN H
ZEUNER M
GERLACH JW
RAUSCHENBACH B
Citation: M. Zeitler et al., IN-SITU STRESS-ANALYSIS OF BORON-NITRIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 139(1-4), 1998, pp. 327-331