Authors:
WARREN WL
SEAGER CH
KANICKI J
CROWDER MS
SIGARI E
Citation: Wl. Warren et al., ULTRAVIOLET-LIGHT INDUCED ANNIHILATION OF SILICON DANGLING BONDS IN HYDROGENATED AMORPHOUS-SILICON NITRIDE FILMS, Journal of applied physics, 77(11), 1995, pp. 5730-5735