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SIMS DEPTH PROFILING OF DELTA-DOPED LAYERS IN SILICON
Authors: SMIRNOV VK SIMAKIN SG POTAPOV EV MAKAROV VV
Citation: Vk. Smirnov et al., SIMS DEPTH PROFILING OF DELTA-DOPED LAYERS IN SILICON, Surface and interface analysis, 24(7), 1996, pp. 469-475
SIMS DEPTH PROFILING OF IMPLANTED LAYERS IN SILICON UNDER N-2(-BOMBARDMENT() ION)
Authors: SMIRNOV VK SIMAKIN SG
Citation: Vk. Smirnov et Sg. Simakin, SIMS DEPTH PROFILING OF IMPLANTED LAYERS IN SILICON UNDER N-2(-BOMBARDMENT() ION), Vacuum, 44(9), 1993, pp. 885-887
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