Authors: ROBLES S RUSSELL K GALIANO M SIVA V KITHCART V NGUYEN BC

Citation: S. Robles et al., GAP FILL AND FILM REFLOW CAPABILITY OF SUBATMOSPHERIC CHEMICAL-VAPOR-DEPOSITED BOROPHOSPHOSILICATE GLASS, Journal of the Electrochemical Society, 143(4), 1996, pp. 1414-1421