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Results: 3
ULTRA SHARP CRYSTALLINE SILICON TIP ARRAY USED AS FIELD EMITTER
Authors: MEHR W WOLFF A FRANKENFELD H SKALOUD T HOPPNER W BUGIEL E LARZ J HUNGER B
Citation: W. Mehr et al., ULTRA SHARP CRYSTALLINE SILICON TIP ARRAY USED AS FIELD EMITTER, Microelectronic engineering, 30(1-4), 1996, pp. 395-398
OPTICAL-EMISSION END-POINT DETECTION FOR REACTIVE ION ETCHING OF SI SIGE STRUCTURES/
Authors: RICHTER HH WOLFF A TILLACK B SKALOUD T
Citation: Hh. Richter et al., OPTICAL-EMISSION END-POINT DETECTION FOR REACTIVE ION ETCHING OF SI SIGE STRUCTURES/, Materials science & engineering. B, Solid-state materials for advanced technology, 27(1), 1994, pp. 39-45
OPTICAL-EMISSION END-POINT DETECTION FOR REACTIVE ION ETCHING OF SI SIGE STRUCTURES/
Authors: RICHTER HH WOLFF A TILLACK B SKALOUD T
Citation: Hh. Richter et al., OPTICAL-EMISSION END-POINT DETECTION FOR REACTIVE ION ETCHING OF SI SIGE STRUCTURES/, Materials science & engineering. B, Solid-state materials for advanced technology, 27(1), 1994, pp. 39-45
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