Authors: SHARAFUTDINOV RG BAKLANOV MR AYUPOV BM BADALYAN AM POLYAKOV OV SKRYTNIKOV AV PARAKHNEVICH AV MOGILNIKOV K BIRYUKOV SV

Citation: Rg. Sharafutdinov et al., CHARACTERISTICS OF PRECIPITATION PROCESSE S AND PROPERTIES OF SILICONLAYERS PREPARED BY JET PLASMA-CHEMICAL TECHNIQUES WITH ELECTRON-BEAM ACTIVATION OF GASES, Zurnal tehniceskoj fiziki, 65(1), 1995, pp. 181-185