Authors: CHAPLANOV V GALKIN I NEFEDOV A SHIPOV I YAKIMOV S GERASIMOVICH S ELINSON V SLEPTSOV V

Citation: V. Chaplanov et al., X-RAY STUDY OF SILICON DISTORTION ON DEPOSITION OF DIAMOND-LIKE FILMS, Thin solid films, 228(1-2), 1993, pp. 297-300