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Results: 1
DYNAMIC NEURAL CONTROL FOR A PLASMA ETCH PROCESS
Authors:
CARD JP SNIDERMAN DL KLIMASAUSKAS C
Citation:
Jp. Card et al., DYNAMIC NEURAL CONTROL FOR A PLASMA ETCH PROCESS, IEEE transactions on neural networks, 8(4), 1997, pp. 883-901
Risultati:
1-1
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