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Results: 1-3 |
Results: 3
MASS-RESOLVED ION ENERGY MEASUREMENTS AT BOTH ELECTRODES OF A 13.56MHZ PLASMA IN CF4
Authors: SNIJKERS RJMM VANSAMBEEK MJM HOPPENBROUWERS MB KROESEN GMW DEHOOG FJ
Citation: Rjmm. Snijkers et al., MASS-RESOLVED ION ENERGY MEASUREMENTS AT BOTH ELECTRODES OF A 13.56MHZ PLASMA IN CF4, Journal of applied physics, 79(12), 1996, pp. 8982-8992
ENERGY-TRANSFER FROM RADIO-FREQUENCY SHEATH ACCELERATED CF(3)(+) AND AR(+) IONS TO A SI WAFER
Authors: KERSTEN H SNIJKERS RJMM SCHULZE J KROESEN GMW DEUTSCH H DEHOOG FJ
Citation: H. Kersten et al., ENERGY-TRANSFER FROM RADIO-FREQUENCY SHEATH ACCELERATED CF(3)(+) AND AR(+) IONS TO A SI WAFER, Applied physics letters, 64(12), 1994, pp. 1496-1498
MASS-RESOLVED ION ENERGY MEASUREMENTS AT THE GROUNDED ELECTRODE OF ANARGON RF PLASMA
Authors: SNIJKERS RJMM VANSAMBEEK MJM KROESEN GMW DEHOOG FJ
Citation: Rjmm. Snijkers et al., MASS-RESOLVED ION ENERGY MEASUREMENTS AT THE GROUNDED ELECTRODE OF ANARGON RF PLASMA, Applied physics letters, 63(3), 1993, pp. 308-310
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