Authors: ATTWOOD D SOMMARGREN G BEGUIRISTAIN R NGUYEN K BOKOR J CEGLIO N JACKSON K KOIKE M UNDERWOOD J

Citation: D. Attwood et al., UNDULATOR RADIATION FOR AT-WAVELENGTH INTERFEROMETRY OF OPTICS FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Applied optics, 32(34), 1993, pp. 7022-7031