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Results: 1
E-BEAM LITHOGRAPHY BY USING AN STEM WITH INTEGRATED LASER INTERFEROMETER STAGE
Authors:
HUBNER B JEDE R SPECHT I ZENGERLE R
Citation:
B. Hubner et al., E-BEAM LITHOGRAPHY BY USING AN STEM WITH INTEGRATED LASER INTERFEROMETER STAGE, Microelectronic engineering, 30(1-4), 1996, pp. 41-44
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