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MODELING OF THE PROCESSES OF BUILDING UP SILICON LAYERS BY FAST IMPULSE HEATING OF BACKINGS BY INCOHERENT RADIATION
Authors:
PROKOPEV EP ZOTOV VV STATSENKO VN
Citation:
Ep. Prokopev et al., MODELING OF THE PROCESSES OF BUILDING UP SILICON LAYERS BY FAST IMPULSE HEATING OF BACKINGS BY INCOHERENT RADIATION, Russian journal of applied chemistry, 67(3), 1994, pp. 449-450
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