Authors: STEARNS DG GAINES DP SWEENEY DW GULLIKSON EM

Citation: Dg. Stearns et al., NONSPECULAR X-RAY-SCATTERING IN A MULTILAYER-COATED IMAGING-SYSTEM, Journal of applied physics, 84(2), 1998, pp. 1003-1028

Authors: VERNON SP STEARNS DG ROSEN RS

Citation: Sp. Vernon et al., CHIRPED MULTILAYER COATINGS FOR INCREASED X-RAY THROUGHPUT, Optics letters, 18(9), 1993, pp. 672-674

Authors: STEARNS DG ROSEN RS VERNON SP

Citation: Dg. Stearns et al., MULTILAYER MIRROR TECHNOLOGY FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Applied optics, 32(34), 1993, pp. 6952-6960

Authors: VERNON SP STEARNS DG ROSEN RS

Citation: Sp. Vernon et al., ION-ASSISTED SPUTTER-DEPOSITION OF MOLYBDENUM SILICON MULTILAYERS, Applied optics, 32(34), 1993, pp. 6969-6974

Authors: ROSEN RS STEARNS DG VILIARDOS MA KASSNER ME VERNON SP CHENG YD

Citation: Rs. Rosen et al., SILICIDE LAYER GROWTH-RATES IN MO SI MULTILAYERS/, Applied optics, 32(34), 1993, pp. 6975-6980