Authors:
NOVIKOV YA
RAKOV AV
SIMONOV AN
STECOLIN IY
STRIZHKOV IB
Citation: Ya. Novikov et al., INTERACTION OF SECONDARY EMISSIVE ELECTRO NS WITH RELIEF SURFACE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 57(8), 1993, pp. 67-72
Citation: Ya. Novikov et al., THE OPTICAL DIFFRACTION GRATING AS A REFE RENCE GAUGE STRUCTURE FOR SCANNING ELECTRON-MICROSCOPE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 57(8), 1993, pp. 79-83
Authors:
NOVIKOV YA
PESHEKHONOV SV
RAKOV AV
SEDOV SV
SIMONOV AN
STECOLIN IY
STRIZHKOV IB
Citation: Ya. Novikov et al., THE DETERMINATION OF MAIN SEM PARAMETERS USING OF SLIT-LIKE SILICON SUBMICRON STRUCTURES, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 57(8), 1993, pp. 84-93