Authors:
CHUI BW
STOWE TD
JU YS
GOODSON KE
KENNY TW
MAMIN HJ
TERRIS BD
RIED RP
RUGAR D
Citation: Bw. Chui et al., LOW-STIFFNESS SILICON CANTILEVERS WITH INTEGRATED HEATERS AND PIEZORESISTIVE SENSORS FOR HIGH-DENSITY AFM THERMOMECHANICAL DATA-STORAGE, Journal of microelectromechanical systems, 7(1), 1998, pp. 69-78
Authors:
BRENNEN RA
HECHT MH
WIBERG DV
MANION SJ
BONIVERT WD
HRUBY JM
SCHOLZ ML
STOWE TD
KENNY TW
JACKSON KH
MALEK CK
Citation: Ra. Brennen et al., FABRICATION OF COLLIMATING GRIDS FOR AN X-RAY SOLAR TELESCOPE USING LIGA METHODS, Microsystem technologies, 3(3), 1997, pp. 91-96
Authors:
CHUI BW
STOWE TD
KENNY TW
MAMIN HJ
TERRIS BD
RUGAR D
Citation: Bw. Chui et al., LOW-STIFFNESS SILICON CANTILEVERS FOR THERMAL WRITING AND PIEZORESISTIVE READBACK WITH THE ATOMIC-FORCE MICROSCOPE, Applied physics letters, 69(18), 1996, pp. 2767-2769