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Results: 1-4 |
Results: 4

Authors: CHUI BW STOWE TD JU YS GOODSON KE KENNY TW MAMIN HJ TERRIS BD RIED RP RUGAR D
Citation: Bw. Chui et al., LOW-STIFFNESS SILICON CANTILEVERS WITH INTEGRATED HEATERS AND PIEZORESISTIVE SENSORS FOR HIGH-DENSITY AFM THERMOMECHANICAL DATA-STORAGE, Journal of microelectromechanical systems, 7(1), 1998, pp. 69-78

Authors: BRENNEN RA HECHT MH WIBERG DV MANION SJ BONIVERT WD HRUBY JM SCHOLZ ML STOWE TD KENNY TW JACKSON KH MALEK CK
Citation: Ra. Brennen et al., FABRICATION OF COLLIMATING GRIDS FOR AN X-RAY SOLAR TELESCOPE USING LIGA METHODS, Microsystem technologies, 3(3), 1997, pp. 91-96

Authors: STOWE TD YASUMURA K KENNY TW BOTKIN D WAGO K RUGAR D
Citation: Td. Stowe et al., ATTONEWTON FORCE DETECTION USING ULTRATHIN SILICON CANTILEVERS, Applied physics letters, 71(2), 1997, pp. 288-290

Authors: CHUI BW STOWE TD KENNY TW MAMIN HJ TERRIS BD RUGAR D
Citation: Bw. Chui et al., LOW-STIFFNESS SILICON CANTILEVERS FOR THERMAL WRITING AND PIEZORESISTIVE READBACK WITH THE ATOMIC-FORCE MICROSCOPE, Applied physics letters, 69(18), 1996, pp. 2767-2769
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