Authors: STRANDMAN C BACKLUND Y

Citation: C. Strandman et Y. Backlund, PASSIVE AND FIXED ALIGNMENT OF DEVICES USING FLEXIBLE SILICON ELEMENTS FORMED BY SELECTIVE ETCHING, Journal of micromechanics and microengineering, 8(1), 1998, pp. 39-44

Authors: STRANDMAN C BACKLUND Y

Citation: C. Strandman et Y. Backlund, BULK SILICON HOLDING STRUCTURES FOR MOUNTING OF OPTICAL FIBERS IN V-GROOVES, Journal of microelectromechanical systems, 6(1), 1997, pp. 35-40

Authors: STRANDMAN C SMITH L TENERZ L HOK B

Citation: C. Strandman et al., A PRODUCTION PROCESS OF SILICON SENSOR ELEMENTS FOR A FIBEROPTIC PRESSURE SENSOR, Sensors and actuators. A, Physical, 63(1), 1997, pp. 69-74

Authors: HEDLUND C STRANDMAN C KATARDJIEV IV BACKLUND Y BERG S BLOM HO

Citation: C. Hedlund et al., METHOD FOR THE DETERMINATION OF THE ANGULAR-DEPENDENCE DURING DRY-ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(5), 1996, pp. 3239-3243

Authors: STRANDMAN C ROSENGREN L ELDERSTIG HGA BACKLUND Y

Citation: C. Strandman et al., FABRICATION OF 45-DEGREES MIRRORS TOGETHER WITH WELL-DEFINED V-GROOVES USING WET ANISOTROPIC ETCHING OF SILICON, Journal of microelectromechanical systems, 4(4), 1995, pp. 213-219