Authors: FREY L PICHLER P KASKO I THIES I LIPP S STRECKFUSS N GONG L RYSSEL H

Citation: L. Frey et al., PRACTICAL ASPECTS OF ION-BEAM ANALYSIS OF SEMICONDUCTOR STRUCTURES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 356-362