Citation: Gc. Stutzin et al., DEPOSITION RATES IN DIRECT-CURRENT DIODE SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(3), 1993, pp. 647-656
Authors:
STUTZIN GC
OSTROM RM
GALLAGHER A
TANENBAUM DM
Citation: Gc. Stutzin et al., NANOSCALE STUDY OF THE AS-GROWN HYDROGENATED AMORPHOUS-SILICON SURFACE, Journal of applied physics, 74(1), 1993, pp. 91-100